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ISO 14644-2: Monitoring to Provide Evidence of Cleanroom Performance

ISO 14644-2 specifies the requirements for establishing a monitoring plan that provides ongoing evidence that your cleanroom continues to perform in accordance with its ISO classification between formal classification tests.

20 Apr 2026 Technical article Knowledge Hub
ISO 14644-2: Monitoring to Provide Evidence of Cleanroom Performance

ISO 14644-2 specifies the requirements for establishing a monitoring plan that provides ongoing evidence that your cleanroom continues to perform in accordance with its ISO classification between formal classification tests.

What It Requires:

A documented monitoring plan specifying monitoring locations, monitoring frequency, sampling volumes, alert and action limits, and the response procedure when limits are exceeded. Monitoring data must be trended and reviewed at defined intervals.

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